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Automation of a Residual Gas Analyzer on a Time-shared Computer

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4 Author(s)
Raimondi, D.L. ; IBM Research Laboratory, San Jose, California 95114, USA ; Winters, H.F. ; Grant, P.M. ; Clarke, D.C.

The automation of a quadrupole mass spectrometer - residual gas analyzer (RGA) on a time-shared IBM 1800 Data Acquisition and Control Computer is described. The RGA, which is used to determine the partial pressures of various gases in a vacuum system, may be operated up to a maximum data rate of about 20,000 points/sec (pps) in an interleaved manner with multiple slow-scanning (≤20 pps) instruments. We review in detail the hardware and software considerations regarding the design and subsequent interfacing of the instrument to the computer. Methods for initiating data collection, entering experimental parameters, and analyzing the experimental data, such as spectrum plotting, smoothing, peak location, mass identification, and calculation of the partial pressures by using a least-squares approximation to fit mass peaks, are discussed with examples.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:15 ,  Issue: 4 )