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Theories of the Distribution of Deposit from Sputtered Disk and Rectangular Electrodes

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1 Author(s)
Jones, R.E. ; IBM Systems Development Division laboratory at San Jose, California 95114, USA

Theoretical expressions for the distribution of deposits sputtered from disk-shaped and rectangular electrodes are derived for cases of 1) uniform emission obeying the cosine emission law, 2) distorted “under cosine” and “over cosine” emission, 3) additional emission confined to the peripheries of the electrodes and obeying the cosine emission law, and 4) distorted “inward” emission from the peripheries.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:16 ,  Issue: 1 )