By Topic

Dimensional Measurement and Defect Detection Using Spatial Filtering

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Flamholz, A.L. ; IBM System Products Division Laboratory, East Fishkill (Hopewell Junction), New York 12533, USA ; Froot, H.A.

A new method is described that utilizes coherent bandpass spatial filtering and subsequent superposition to form filtered images in which small differences in size and geometry of the original object are readily detected. The theoretical basis is discussed and experiments described in which signal ratios of about 10:1 are obtained for a diameter change of 2.5 percent of a clear circular disc. The method is used to process in parallel a 57-mm evaporation mask containing 12,000 holes, each being 0.1 mm in diameter. The size of each hole is accurately gauged and small imperfections are indicated in the filtered image.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:17 ,  Issue: 6 )