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Magnetic properties of Fe(N)/NiFe(N) sputtered on sloping surfaces

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4 Author(s)
Jones, R.E. ; Carnegie Mellon Univ., Pittsburgh, PA, USA ; Spector, C.J. ; Williams, J.L. ; Lin, C.‐J.

The magnetic properties of sputtered iron-based films can be significantly different when deposited on sloping surfaces. For example, anisotropy fields, Hk, and easy axis coercivities, Hce , of Fe(N)/NiFe(N) films in this study were as much as two orders of magnitude higher on 60° tilted surfaces than on flat surfaces. The use of high substrate bias during deposition effectively lessened increases of Hk and Hce. These parameters were largely independent of the nitrogen content of the films, implying the observed increases were not strongly dependent on magnetostriction. The large Hk and the Hce values are believed to be caused by a shape anisotropy associated with angle-of-incidence deposition and film crystallite morphology

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Magnetics, IEEE Transactions on  (Volume:32 ,  Issue: 5 )