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Rapid and Precise Method for Analysis of Energy Dispersive X-Ray Spectra

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1 Author(s)
Huang, T.C. ; IBM Research Division laboratory, 5600 Cottle Road, San Jose, California 9513, USA

A new, precise, and rapid method for the analysis of energy dispersive x-ray spectra generated by electron beam or x-ray excitation is presented. It includes the use of Gaussian profiles and a polynomial of 1/E (where E is the x-ray energy) to represent the observed x-ray characteristic lines and background, automatic sectioning of the entire spectrum, and a figure of merit to estimate goodness of fit. Details of the method and its programming techniques are given. Results of analyzing complicated energy dispersive x-ray (EDX) spectra of multi-element alloys are presented.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

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IBM Journal of Research and Development  (Volume:23 ,  Issue: 2 )