1/N Circuit and Device Technology

The 1/N memory cell is the bipolar analog of the FET one-device cell. A thin dielectric and doped polysilicon are combined with bipolar technology to achieve a vertically integrated, high-density, fast-performance memory chip. The circuit design, device structure, and processing implementation for a 64K-bit dynamic, 1/N fractional-device, experimental bipolar memory are presented. Test results for several geometrical and structural variations, including 16K-bit storage arrays, are given.