By Topic

Semiconductor Manufacturing Technology at IBM

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Carre, H. ; IBM France, Boîte Postale 58, 911102 Corbeil-Essonnes, France ; Doxtator, R.H. ; Duffy, M.C.

IBM's current semiconductor manufacturing processes are summarized. Briefly outlined are highlights of salient features of semiconductor manufacturing that established IBM leadership and direction for embarking on VLSI production. Some of these features are taken from papers already published; others are from articles in this issue of the IBM Journal of Research and Development ranging from silicon crystal growth through quality control and automated logistics and dispositioning of tested product.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:26 ,  Issue: 5 )