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Construction of a UHV scanning tunneling microscope

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2 Author(s)
S. Chiang ; IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120, USA ; R. J. Wilson

In our laboratory, we have built an ultrahigh-vacuum scanning tunneling microscope (STM). The STM is mounted onto one flange in an ultrahigh-vacuum chamber which is connected by a transfer chamber to a surface-analysis system equipped with 500-Å-resolution SAM/SEM, XPS, LEED, and sample-heating and sample-cleaning facilities. Samples and tips can be moved throughout the combined vacuum system. We describe the design and performance of the instrument and show some preliminary data on Si(111). We also show some recent results of experiments on tip preparation.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:30 ,  Issue: 5 )