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Wide-range, low-operating-voltage, bimorph STM: Application as potentiometer

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3 Author(s)
P. Muralt ; Institute for Atomic and Solid State Physics, Free University of Berlin, Arnimallee 14, D1000 Berlin 33, Federal Republic of Germany ; D. W. Pohl ; W. Denk

An STM is described which operates at voltages ≤120 V. Its 3D scanner offers a wide range of displacements, has low drift and hysteresis, and exhibits good resolution. These features make it interesting for technical applications. In addition, its use as a potentiometer is described.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:30 ,  Issue: 5 )