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Nanolithography with a high-resolution STEM

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5 Author(s)
Umbach, C.P. ; IBM Research Division, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA ; Broers, A.N. ; Koch, R.H. ; Willson, C.G.
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A high-resolution scanning transmission electron microscope (STEM) with a beam diameter approaching 0.6 nm has been adapted for the patterning of complex fine-line nanostructures. An IBM PC XT is used as the pattern generator to direct the scan electronics from a Cambridge Stereoscan 250 which have been interfaced with the scanning coils of the STEM. A study of the ultimate resolution of the newly designed acid-catalyzed resist poly(p-t-butyloxycarbonyloxystyrene) has been carried out. The STEM has proven to be a flexible tool in the fabrication of individual nanostructure devices for quantum transport studies in mesoscopic devices smaller than an electron phase-coherence length.

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Published in:

IBM Journal of Research and Development  (Volume:32 ,  Issue: 4 )