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Design considerations for the IBM X-ray lithography facility

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2 Author(s)
Leavey, J.A. ; IBM Federal Systems Company, East Fishkill facility, Route 52, Hopewell Junction, New York 12533, USA ; Lesoine, L.G.

Synchrotrons, like other large particle accelerators, have historically been the tools of universities and national laboratories for research. Moving this technology to industry presents many challenges which do not exist in an academic environment. One major challenge is to develop a facility to house and support the ring in a manufacturing-like mode where operator, customer, and public concern for radiation and industrial safety is of extreme importance. This paper describes IBM's efforts to design and build a facility to address these safety concerns.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:37 ,  Issue: 3 )

Date of Publication:

May 1993

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