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The Helios 1 compact superconducting storage ring X-ray source

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9 Author(s)
Wilson, M.N. ; Oxford Instruments Ltd., Accelerator Technology Group, Osney Mead, OX2 0DX, England ; Smith, A.I.C. ; Kempson, V.C. ; Townsend, M.C.
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The basic properties of synchrotron radiation are described, the design of storage rings to produce synchrotron radiation is outlined, and the criteria for matching storage ring design to the needs of X-ray lithography are discussed. Simple scaling laws are presented showing the benefits for a storage ring of using the higher fields which superconducting magnets are able to provide. Helios 1 is a compact superconducting storage ring built by Oxford Instruments for installation at the IBM Advanced Lithography Facility (ALF). Design choices for superconducting rings are discussed, and the design and construction of Helios are described. Test results from the initial commissioning of Helios at Oxford are presented, but the main data on its performance when installed at ALF are given in another paper in this issue.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:37 ,  Issue: 3 )