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Early history of X-ray lithography at IBM

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1 Author(s)
E. Spiller ; IBM Research Division, Thomas J. Watson Research Center, P.O. Bax 218, Yorktown Heights, New York 10598, USA

We present a reconstruction of the early work on X-ray lithography at the IBM East Fishkill facility in 1969 and 1970 and a summary of the efforts at the Thomas J. Watson Research Center in Yorktown Heights, New York, between 1973 and 1976.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:37 ,  Issue: 3 )