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Plasma-deposited diamondlike carbon and related materials

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1 Author(s)
Grill, A. ; IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA

Diamondlike carbon (DLC) prepared by plasma-enhanced CVD is a metastable amorphous material characterized by attractive optical, electrical, chemical, and tribological properties. DLC films can be prepared at low temperatures from a large variety of precursors, and can be modified by the incorporation of different elements such as N, F, Si, or metals. The diversity of plasma conditions and precursors used for the deposition of DLC films provides flexibility to tailor their properties for specific needs and potential applications. This paper presents a review of the preparation of DLC and related materials, their properties, and their use in different applications.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:43 ,  Issue: 1.2 )

Date of Publication:

Jan. 1999

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