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Low-energy electron microscopy

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1 Author(s)
R. M. Tromp ; IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA

Low-energy electron microscopy (LEEM) is a relatively new microscopy technique, capable of high-resolution (5 nm) video-rate imaging of surfaces and interfaces. This opens up the possibility of studying dynamic processes at surfaces, such as thin-film growth, strain relief, etching and adsorption, and phase transitions in real time, in situ, as they occur. The resulting video movies contain an unprecedented amount of information that is amenable to detailed, quantitative analysis. In this paper we discuss the principles of LEEM and its application to problems in science and technology.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:44 ,  Issue: 4 )