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Atomic resolution analytical microscopy

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1 Author(s)
Batson, P.E. ; IBM Research Division, Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA

It is possible under favorable circumstances to identify composition, bonding, and electronic structure with atomic resolution in microelectronic device structures. In current device structures, where only a few interface atoms can dominate the performance of a device, this can contribute important understanding relevant to product development. This paper is a brief overview of work in our laboratory using scanning transmission electron microscopy to achieve such capabilities.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:44 ,  Issue: 4 )