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Process modeling for future technologies

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1 Author(s)
M. E. Law ; Department of Electrical and Computer Engineering, University of Florida, P.O. Box 116130, Gainesville, 32611, USA

Process modeling is an integral portion of technology computer-aided design (TCAD) and can be used to predict device structures and doping. Truly predictive process modeling has proven to be an elusive goal, because the controlling physics is complicated and difficult to investigate experimentally. The current state of process modeling is reviewed, and current and future challenges are discussed. Recent helpful trends are indicated, and problems that must be addressed are identified.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:46 ,  Issue: 2.3 )