By Topic

Implementation and characterization of a tunable quality factor micromachined inductor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Yu-Che Huang ; Power Mech. Eng. Dept., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Ben-Hwa Jang ; Weileun Fang

This study demonstrated a novel tunable quality factor and self-assembly inductor using an alternating magnetic flux. The merit of the design was to tilt the inductor from the lossy substrate and localize welding for assembly simultaneously using the magnetic film. The 8-turn of meander strip inductor with a thickness of 10 ¿m was fabricated using MicroElectroMechanical Systems (MEMS) technology. The RF performance of the inductor at various tilting angles away from the substrate (0°, 45°, and 90°) was characterized by using a two-port vector network analyzer (VNA). The measurement results indicated that the quality factor (Q) and the self-resonant frequency (fres) can be enhanced about 107% and 1.08%, respectively.

Published in:

Microsystems, Packaging, Assembly and Circuits Technology Conference, 2009. IMPACT 2009. 4th International

Date of Conference:

21-23 Oct. 2009