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High-resolution X-ray characterization of mid-IR QCL structures

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4 Author(s)
Kubacka-Traczyk, J. ; Inst. of Electron Technol., Warsaw, Poland ; Sankowska, I. ; Kosiel, K. ; Bugajski, M.

In this paper, five Quantum Cascade Laser structures were investigated by using high-resolution X-ray diffractometry. The information about perfection and periodicity of the structures was derived from simulation of diffraction profiles generated using dynamical diffraction theory. HRXRD characterization enabled to optimize the growth conditions of the laser structures towards achieving the high degree of crystalline quality necessary for optimum device performance.

Published in:

Terahertz and Mid Infrared Radiation: Basic Research and Practical Applications, 2009. TERA-MIR 2009. International Workshop

Date of Conference:

Nov. 3 2009-Oct. 6 2009