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In this paper, we develop a new process using an atomic force microscope (AFM) to fabricate micro- and nanostructures. An AFM probe was coated with gold, and then, slid on a silicon substrate in ambient environment. Repetitive sliding of the probe generated a nanostructure on the substrate instead of plowing. The Au material was found to transfer from the probe onto the Si substrate. Morphological, electrical, and chemical properties were characterized using high-resolution techniques. It was found that the nanostructure was composed of an Au-Si alloy, which behaved like a conductor. The mechanisms of the process and effects of electrical potential are discussed in this paper.