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We report on the first demonstration of guiding light in horizontal slot-waveguides using a plasma-enhanced chemical vapor deposition silicon carbide (SiC)-silicon oxide (SiO2)-SiC structure. Propagation losses of 23.9 ??1.2 dB/cm have been measured for the quasi-transverse-magnetic mode of the fabricated slot waveguides at 1.3 ??m .
Date of Publication: March15, 2010