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Characterization of ion emission of an extreme ultraviolet generating discharge produced Sn plasma

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6 Author(s)
Gielissen, K. ; Eindhoven University of Technology, Den Dolech 2, 5600 MB Eindhoven, The Netherlands ; Sidelnikov, Y. ; Glushkov, D. ; Soer, W.A.
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The ion emission of a Sn-based discharge produced extreme ultraviolet producing plasma is characterized with the combined use of different time-of-flight techniques. An electrostatic ion spectrometer is employed to measure the average charge distribution of the emitted Sn ions. A dedicated Faraday cup configuration is used to measure the total ion flux from the source for different discharge energies. High-energy Sn ions emitted by the plasma with energies up to 100 keV have been identified. The number of high-energy ions increases for higher electrical input energy into the plasma while the signal associated with the expanding plasma ions does not show such dependence. The ion energy distribution for a bulk of detected ions is calculated based on the Faraday cup measurements and compared with theoretical plasma expansion dynamics.

Published in:

Journal of Applied Physics  (Volume:107 ,  Issue: 1 )

Date of Publication:

Jan 2010

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