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The effect of temperature in the 293–473 K range, on the secondary electron emission (SEE) yield of single crystal and polycrystalline diamond film surfaces is reported. For the polycrystalline films the SEE yield was found to decay as function of electron irradiation dose while for the single crystal an increase occurs first, followed by a decrease. For both surfaces, the SEE yield increases significantly upon heating and obtained a nearly constant value with electron dose at 473 K. These effects are explained as due to the temperature dependence of the electron beam induced hydrogen desorption and surface band bending.