By Topic

Resonating Frequency of a SAD Circuit Loop and Inner Microcantilever in a Gas Sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Li, Peng ; Dept. of Precision Instrum. & Mech., Tsinghua Univ., Beijing, China ; Jiahao Zhao ; Shijie Yu ; Liu Guan
more authors

A self-actuating and detecting (SAD) circuit loop that drives a micro-cantilever in a gas sensor, in which the resonance frequency shifting of the beam is monitored to detect its mass change caused by adsorption of certain gas molecules, is presented. The loop cannot only drive the cantilever but also trace the fundamental resonance frequency shift of the beam. The motivation of the SAD circuit is simplifying structure and process of the microbeam. This paper presents simulation and experiments of the mechanical resonance of the microbeam and resonance of the electric signal in the SAD loop. The relations between the two resonance frequencies are discussed and analyzed. While the beam is driven in resonating mode, the resonance frequency shift of the signal in the SAD circuit is approximately equal to the mechanical resonant frequency shift of the cantilever. The frequency resolution of the SAD with the microbeam is 0.6-0.7 Hz in our work, and theoretical measurement range of the system is 18750 Hz.

Published in:

Sensors Journal, IEEE  (Volume:10 ,  Issue: 2 )