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Bridging Fault Diagnosis to Identify the Layer of Systematic Defects

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3 Author(s)
Po-Juei Chen ; Grad. Inst. of Electron. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Li, J.C.-M. ; Chao, H.J.

Diagnosis for systematic defects is very critical for yield learning in nanometer technology. This paper presents a bridging fault diagnosis which identifies a single layer of systematic defects (LSD), where more than expected numbers of bridging faults are located. The proposed technique is a layout-aware diagnosis which contains bridging pair extraction, structural analysis, and layer-oriented covering. Instead of treating each failing CUT independently, a statistical method (Z-test) is applied to diagnose all CUTs simultaneously. Experiments on six of seven large ISCAS'89 benchmark circuits successfully diagnose LSD for single bridging fault as well as multiple bridging faults.

Published in:

Asian Test Symposium, 2009. ATS '09.

Date of Conference:

23-26 Nov. 2009