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Fuzzy Predictive Control in Czochralski Crystal Growth with Power Input as the Unique Manipulation

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3 Author(s)
Yongling Fu ; Sch. of Autom. Sci. & Electr. Eng., Beihang Univ., Beijing, China ; Kai Zhang ; Xiaoye Qi

This paper presents a study to Czochralski crystal growth process based on Hurle's model linearized at the equilibrium points. In this study, we do the attempt to get single crystal with constant diameter using the power input as the unique manipulation by removing pull rate manipulation which was suspected to be contributing to structure defects in the crystal from the system. Compared with the traditional PID, fuzzy predictive control algorithm is more effective to handle the Czochralski growth process which enhances the tracking capability and system robustness. Simulation results indicate that we can get the constant diameter of crystal by manipulating the power input only and fuzzy predictive control is more effective to the time-lagging and inertia system.

Published in:

Fuzzy Systems and Knowledge Discovery, 2009. FSKD '09. Sixth International Conference on  (Volume:3 )

Date of Conference:

14-16 Aug. 2009