By Topic

Design and Fabrication of a Tunable Superconductive Resonator Utilizing Micromachined Tunable Capacitor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Yi-Jie Chen ; Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan ; Wen-Pin Shih ; Cheng-Kai Kao ; Pei-Zen Chang

This paper presents the design, fabrication, and characterizations of a flip-chip-bonded micromachined capacitor for tuning a high-temperature superconductive resonator. The major issue of the tunable superconductive resonator is its high driving voltage due to the accumulated thermal stresses and the sensitivity of the superconductive material to the fabrication process. The tunable capacitor in the form of a microbridge with flexible boundaries is proposed to reduce thermal stress. Thermal stress is reduced to 10 MPa, and the pull-in voltage of the capacitor is 25 V. The micromachined capacitor and the superconductive resonator are fabricated separately and then integrated together by using a flip-chip-bonding technique. This integration method prevents the superconductor material from the high-temperature process. At 75-K operation temperature, the measured center frequency of the fabricated tunable resonator changes from 2.93 to 2.87 GHz when the driving voltage increases from 0 to 40 V.

Published in:

Journal of Microelectromechanical Systems  (Volume:19 ,  Issue: 1 )