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Hunting Down the Bubble Makers in Fabs

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2 Author(s)
Hassoun, M. ; Ind. Eng. & Manage. Dept., Ben Gurion Univ. of the Negrev, Beer-Sheva, Israel ; Rabinowitz, G.

Based on a simulated non volatile memory fab, we employ data-mining to identify and quantify the apparent causes of work in process bubbles along the process. The chosen bubble formalization methods proved able to detect the phenomenon and enabled its occurrence frequency to be forecasted. In the chosen environment, bubbles seem to be highly correlated with the utilization patterns of the process segment considered.

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:23 ,  Issue: 1 )