By Topic

Hunting Down the Bubble Makers in Fabs

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
M. Hassoun ; Ind. Eng. & Manage. Dept., Ben Gurion Univ. of the Negrev, Beer-Sheva, Israel ; G. Rabinowitz

Based on a simulated non volatile memory fab, we employ data-mining to identify and quantify the apparent causes of work in process bubbles along the process. The chosen bubble formalization methods proved able to detect the phenomenon and enabled its occurrence frequency to be forecasted. In the chosen environment, bubbles seem to be highly correlated with the utilization patterns of the process segment considered.

Published in:

IEEE Transactions on Semiconductor Manufacturing  (Volume:23 ,  Issue: 1 )