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A low noise, high resolution silicon temperature sensor

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3 Author(s)
Szajda, Kenneth S. ; Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA ; Sodini, C.G. ; Bowman, H.Frederick

High resolution temperature measurement is essential for determination of blood perfusion in biomaterials. A compact, low noise, high resolution temperature sensor designed for use in an invasive tissue property measurement probe is presented. The circuit is based on traditional proportional-to-absolute-temperature (PTAT) principles. A feedback technique is used to improve linearity and reduce noise. Data from test chips shows temperature resolution of 3 m°C. The chips were fabricated using a 1.75 μm double poly, single metal modified CMOS process designed for this project

Published in:

Solid-State Circuits, IEEE Journal of  (Volume:31 ,  Issue: 9 )