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Positioning Pd catalyst particles for carbon nanotube growth using charge patterns created with a scanning electron microscope

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5 Author(s)
Zonnevylle, A.C. ; Department of Imaging Science Charged Particle Optics Group, Faculty of Applied Sciences, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands ; Hagen, C.W. ; Kruit, P. ; Valenti, M.
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Positioning of charged nanoparticles with the help of charge patterns in an insulator substrate is a known method. However, the creation of charge patterns with a scanning electron microscope for this is relatively new. Here a scanning electron microscope is used for the creation of localized charge patterns in an insulator, while a glowing wire generator is used as the nanoparticle source. The deposited palladium nanoparticles are used as catalysts for the localized growth of carbon nanotubes in a chemical vapor deposition oven. The authors show first the results on local carbon nanotube growth using this procedure.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:27 ,  Issue: 6 )

Date of Publication:

Nov 2009

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