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High-aspect-ratio gold electrodes fabricated by thick-multilevel interconnection technology for electrical isolation of MEMS mirrors in wavelength-selective switches

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9 Author(s)
Sakata, T. ; NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan ; Usui, M. ; Uchiyama, S. ; Shimoyama, N.
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Electrical separation-walls with a high aspect ratio are fabricated in the narrow space between mirror-drive electrodes. With these walls between adjacent channels, each MEMS mirror successfully operates with very low electrical interference.

Published in:
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE

Date of Conference: 4-8 Oct. 2009

Page(s):
579 - 580
ISSN :
1092-8081
E-ISBN :
978-1-4244-3681-1
Print ISBN:
978-1-4244-3680-4
INSPEC Accession Number:
11000517
Conference Location :
Belek-Antalya
Digital Object Identifier :
10.1109/LEOS.2009.5343121
Product Type:
Conference Publications

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