Cart (Loading....) | Create Account
Close category search window

Charging, Coagulation, and Heating Model of Nanoparticles in a Low-Pressure Plasma Accounting for Ion–Neutral Collisions

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Galli, F. ; Dept. of Mech. Eng., Univ. of Minnesota, Minneapolis, MN, USA ; Kortshagen, Uwe R.

Low-pressure silane-argon plasmas allow the production of silicon particles of different sizes and morphologies. A better understanding of the correlations between dusty-plasma properties and particle morphology is very important for understanding and optimizing the particle synthesis. An analytical model predicting the nanoparticle charging, coagulation, and heating in a low-pressure plasma is here presented. The model includes the effect of collisions between ions and neutrals in proximity of the particles. In agreement with experimental evidence for pressures of a few torr, a charge distribution that is less negative than the prediction from the collisionless orbital-motion limited theory is obtained. The reduced charging causes an enhanced ion current to the particle while still preventing coagulation and conserving a monodisperse particle size distribution. Ion-electron recombination at the particle surface, together with other particle heating and cooling mechanisms typical of silane-argon plasmas, are studied in a particle-heating model which predicts the nanoparticle temperature. The effect of plasma parameters on the nanoparticle temperature is discussed, and the predictive power of the model is demonstrated from the appearance of photoluminescent properties in silicon nanoparticles, a property present only in crystalline particles. A correlation between plasma power, ion density, particle temperature, and particle crystallinity is finally developed.

Published in:

Plasma Science, IEEE Transactions on  (Volume:38 ,  Issue: 4 )

Date of Publication:

April 2010

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.