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Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry

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4 Author(s)
Liang-Chia Chen ; Grad. Inst. of Autom. Technol., Nat. Taipei Univ. of Technol., Taipei, Taiwan ; Xuan-Loc Nguyen ; Hsin-Sing Huang ; Jin-Liang Chen

In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry.

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Industrial Electronics, IEEE Transactions on  (Volume:57 ,  Issue: 3 )