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Wireless driving of micromirror using electromagnetic induction

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4 Author(s)
Sasaki, M. ; Dept. of Adv. Sci. & Technol., Toyota Technol. Inst., Nagoya, Japan ; Ohnishi, N. ; Kumagai, S. ; Hane, K.

The wireless driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-voltage driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6deg at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009

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