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Large MEMS-based programmable slit mask for multi-object spectroscopy

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6 Author(s)
Canonica, M. ; Ecole Polytech. Fed. de Lausanne, Neuchatel, Switzerland ; Waldis, S. ; Zamkotsian, F. ; Lanzoni, P.
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Next-generation infrared astronomical instrumentation for telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy. A large micromirror array of 20'000 micromirrors has been fabricated for cryogenic environment utilizing a dedicated assembly stage. Preliminary tests demonstrate the functionality of both the assembly system and the device.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009