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Large-scale application of binary subwavelength structures

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7 Author(s)
Kley, E.-B. ; Inst. fur Angewandte Phys., FSU Jena, Jena, Germany ; Freese, W. ; Kampfe, T. ; Tunnermann, A.
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We report on the design, fabrication and characterization of large-scale diffractive elements with high diffraction efficiencies, tailored polarization behaviour and small wave-front errors using special binary subwavelength structures.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009