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All optically driven MEMS deformable mirrors via direct cascading with wafer bonded GaAs/GaP PIN photodetectors

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6 Author(s)
Mathur, V. ; Dept. of Phys. & Appl. Phys., Univ. of Massachusetts, Lowell, MA, USA ; Vangala, S.R. ; Qian, X. ; Goodhue, W.D.
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Significant progress has been made to realize optically controlled phase correction micro-mirror arrays. The devices consist of silicon nitride spring plate mirrors optically actuated by integrated GaAs P-I-N photodetectors wafer bonded on a GaP platform.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009