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A mixed-signal analysis tool for MOEMS based on circuit simulator

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5 Author(s)
Takahashi, T. ; Inst. of Ind. Sci. (IIS), Univ. of Tokyo, Tokyo, Japan ; Maruyama, S. ; Mita, M. ; Fujita, H.
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We report a newly developed mixed-signal simulation tool for micro optoelectromechanical systems. Multi-physics signals in electrical, mechanical and optical domains are handed as electrical voltage or current in a circuit simulator Qucs, by implementing an equation-defined analytical model into the voltage-controlled current sources. This paper reports an equivalent circuit implementation of the electrostatic torsion mirror scanner.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009