Scheduled System Maintenance:
Some services will be unavailable Sunday, March 29th through Monday, March 30th. We apologize for the inconvenience.
By Topic

Optical MEMS filter for gas spectroscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
7 Author(s)

An optical MEMS filter for infrared spectroscopy has been designed, fabricated, and tested. The filter is a deformable hologram which combines focusing and optical filtering into one element. By modulating sections of the hologram, transmission spectra adapted to the absorption lines of a gas can be generated, allowing accurate measurements of gas concentration. The device is fabricated by micromachining grooves in silicon on top of an electrostatic actuator.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009