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Optical MEMS filter for gas spectroscopy

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7 Author(s)

An optical MEMS filter for infrared spectroscopy has been designed, fabricated, and tested. The filter is a deformable hologram which combines focusing and optical filtering into one element. By modulating sections of the hologram, transmission spectra adapted to the absorption lines of a gas can be generated, allowing accurate measurements of gas concentration. The device is fabricated by micromachining grooves in silicon on top of an electrostatic actuator.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009