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Reliability-based characterization of single crystalline silicon micromirrors for space applications

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5 Author(s)
Byung-Wook Yoo ; Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea ; Jae-Hyoung Park ; Joo-Young Jin ; Park, I.H.
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We focus on reliability-based tests of one-axis single crystalline silicon micromirrors and performance in space environments. Reliability testing inhere shows how to deal with fabrication misalignment, charging effect, settling time reduction, shock and vibration in space, stiction in humidity, and reflectivity degradation related to outgassing. The micromirror in the international space station (ISS) actuated successfully under non-gravity condition as on earth.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009