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CMOS-MEMS based optical phase shifter array with high fill factor

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4 Author(s)
Chiou, J.C. ; Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Hung, C.C. ; Shieh, L.J. ; Tsai, Z.L.

The proposed CMOS-MEMS optical phase shifter activates lambda/4 vertical displacement with 3 V driving voltages and achieves the mirror deformation within lambda/10. The fill factor is 90% without the need of flip-chip bonding technology.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009