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CMOS-MEMS based optical phase shifter array with high fill factor

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4 Author(s)
J. C. Chiou ; Department of Electrical and Control Engineering, National Chiao Tung University, 1001 Ta Hsueh Road, Hsinchu, Taiwan, 300, R.O.C. ; C. C. Hung ; L. J. Shieh ; Z. L. Tsai

The proposed CMOS-MEMS optical phase shifter activates lambda/4 vertical displacement with 3 V driving voltages and achieves the mirror deformation within lambda/10. The fill factor is 90% without the need of flip-chip bonding technology.

Published in:

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Date of Conference:

17-20 Aug. 2009