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Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

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6 Author(s)
Inokuchi, M. ; Dept. of Intell. Machinery & Syst., Kyushu Univ., Fukuoka, Japan ; Ando, H. ; Kinosita, M. ; Akase, K.
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We have developed an ultra-micro displacement sensor (Size:1.3 mmtimes1.3 mmtimes1.3 mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.

Published in:

Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on

Date of Conference:

17-20 Aug. 2009