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This paper describes a mixed signal approach to micro-hotplate temperature control technique using digital On-off control logic. The novel micro-hotplate used for this purpose is based on standard 600 nm CMOS technology and contains a metal micro-heater, a (parasitic) bipolar transistor temperature sensor and an interdigitated electrode in a dielectric membrane. The micro-hotplate and the mixed-signal controller circuit are integrated on a single chip. Typically such micro-hotplate are used in MEMS gas sensing application where we believe on-chip integration will enable accurate temperature monitoring and control with the added benefit of producing low power, low cost gas sensors.
Semiconductor Conference, 2009. CAS 2009. International (Volume:2 )
Date of Conference: 12-14 Oct. 2009