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Mixed signal temperature control circuit for on-chip CMOS gas sensor

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7 Author(s)
Garofalo, V. ; Dept. of Biomed., Electron. & Telecom Eng., Univ. of Naples Federico II, Naples, Italy ; Guha, P.K. ; Ali, S.Z. ; Santra, S.
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This paper describes a mixed signal approach to micro-hotplate temperature control technique using digital On-off control logic. The novel micro-hotplate used for this purpose is based on standard 600 nm CMOS technology and contains a metal micro-heater, a (parasitic) bipolar transistor temperature sensor and an interdigitated electrode in a dielectric membrane. The micro-hotplate and the mixed-signal controller circuit are integrated on a single chip. Typically such micro-hotplate are used in MEMS gas sensing application where we believe on-chip integration will enable accurate temperature monitoring and control with the added benefit of producing low power, low cost gas sensors.

Published in:

Semiconductor Conference, 2009. CAS 2009. International  (Volume:2 )

Date of Conference:

12-14 Oct. 2009