Referenced Items are not available for this document.
A novel process using embedded X-ray masks that allows the fabrication of 3D terahertz waveguide components is demonstrated. X-rays produced by a laser plasma source are used to expose a chemically amplified resist. To produce structures with the required depth (~50 μm) a cyclic exposure and development technique is used. A representative waveguide cavity intended for operation at 2.5 THz is realised
Published in:
Electronics Letters
(Volume:32
,
Issue:
19
)
Date of Publication: 12 Sep 1996
- Page(s):
- 1794 - 1795
- ISSN :
- 0013-5194
- INSPEC Accession Number:
- 5387754
- Digital Object Identifier :
- 10.1049/el:19961166
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- 12 Sep 1996
- Sponsored by :
- Institution of Engineering and Technology
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