By Topic

Terahertz waveguide components fabricated using a 3D X-ray microfabrication technique

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Moon, S.W. ; Rutherford Appleton Lab., Chilton, UK ; Mann, C.M. ; Maddison, B.J. ; Turcu, I.C.E.
more authors

A novel process using embedded X-ray masks that allows the fabrication of 3D terahertz waveguide components is demonstrated. X-rays produced by a laser plasma source are used to expose a chemically amplified resist. To produce structures with the required depth (~50 μm) a cyclic exposure and development technique is used. A representative waveguide cavity intended for operation at 2.5 THz is realised

Published in:

Electronics Letters  (Volume:32 ,  Issue: 19 )