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Hybrid integration of eight channel PD-array on silica-based PLC using micro-mirror fabrication technique

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6 Author(s)
Terui, H. ; NTT Opto-Electron. Labs., Ibaraki ; Shimokozono, M. ; Yanagisawa, M. ; Hashimoto, T.
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A novel micro-mirror for vertical optical output has been successfully fabricated in a singlemode silica-based planar lightwave circuit (PLC) on Si. An eight channel planar photodiode array was assembled on this PLC. The assembled PLC exhibited an average responsivity of 0.92 A/W and a responsivity deviation of 0.34 dB at a wavelength of 1.31 μm

Published in:

Electronics Letters  (Volume:32 ,  Issue: 18 )