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Evaluation of the catalytic metal for the hydrogen sensor using terahertz chemical microscope

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6 Author(s)
Sugimoto, T. ; Grad. Sch., Natural Sci. & Technol., Okayama Univ., Okayama, Japan ; Kondo, Y. ; Kiwa, T. ; Kawayama, I.
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To develop the hydrogen sensor, the chemical potential due to the catalytic reaction of the metals are required to evaluate. The platinum and titanium layered electrode on the insulator/semiconductor layered device are fabricated as the test chip. The catalytic reaction of platinum and hydrogen gas were successfully visualized.

Published in:

Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on

Date of Conference:

21-25 Sept. 2009