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In this paper, a novel integrated horn antenna for terahertz applications is proposed in order to enhance the performance of planar antenna elements. The processing of this type horn antenna combines two different MEMS techniques, DRIE and wet etching. The structure of the horn includes two parts, pyramid horn back cavity and octagonal horn front cavity. There are many tunable parameters of the horn, so high performance terahertz antenna elements can be achieved by synthesizing these parameters.