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Design and fabrication of SOI-based MEMS for mechanical memory storage

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4 Author(s)
Parent, A. ; CEA, DAM, Arpajon, France ; Tassetti, C.-M. ; Haussy, J. ; Tissot, A.

This paper presents the design and fabrication of SOI-based MEMS for mechanical memory storage (theoretical analysis and FEM) dedicated to reliability irradiative study. The memory data is the position of a mechanical ldquobi-stablerdquo. The data is written with thermal actuators and read with electrostatic comb electrodes.

Published in:

SOI Conference, 2009 IEEE International

Date of Conference:

5-8 Oct. 2009