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A Study on High-Speed and High-Precision Tracking Control of Large-Scale Stage Using Perfect Tracking Control Method Based on Multirate Feedforward Control

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4 Author(s)
Saiki, K. ; Precision Equip. Co., Nikon Corp., Yokohama, Japan ; Hara, A. ; Sakata, K. ; Fujimoto, H.

In hard-disk-drive control, the perfect tracking control (PTC) method has already obtained high performance. Therefore, the first author and his group study the PTC scheme for improving the performance of large-scale stages. This paper presents an application of the PTC scheme to the tracking control of two different stages. The results from both simulations and experiments show that the PTC method outperforms the conventional rigid-body-mode-based feedforward method.

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Industrial Electronics, IEEE Transactions on  (Volume:57 ,  Issue: 4 )