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A Single-Axis Low-Cost Accelerometer Fabricated Using Printed-Circuit-Board Techniques

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4 Author(s)
Dapeng Qiao ; Dept. of Electr. & Electron. Eng., Univ. of Hong Kong, Hong Kong, China ; Pang, G.K.H. ; Man-Kit Mui ; Lam, D.C.C.

This letter presents a new single-axis low-cost printed-circuit-board (PCB)-based accelerometer. Motivated by the need to develop low-cost human-sensing accelerometer, a capacitive PCB-based microelectromechanical-system (MEMS) accelerometer is developed, and the experimental results of the prototype have demonstrated that the objective is feasible. The PCB-based MEMS accelerometer is fabricated with a metal film adhered to a PCB, which forms the two electrodes of the sensing capacitor of the accelerometer. This signal is compared with the output signal of a commercially available accelerometer, ADXL330, by Analog Devices. The prototypes are designed to have a dynamic range of plusmn5 g and a bandwidth from 0 to 20 Hz, which covers the range of accelerations for human limbs. The result shows that the new low-cost accelerometer can fulfill the requirement of human motion sensing.

Published in:

Electron Device Letters, IEEE  (Volume:30 ,  Issue: 12 )